******* BSE *******

[MAIN]
AccFrames=1
Date=2021-05-26
Device=MIRA3 LMH
FullUserName=Ryan Ogliore
ImageStripSize=0
Magnification=5.0880e3
PixelSizeX=48.828e-9
PixelSizeY=48.828e-9
SerialNumber=MI1751274US
TagRevision=2
Time=08:19:10
UserName=Ryan
Version=4.2.27.0

[SEM]
3DBeamTiltX=0.0
3DBeamTiltY=0.0
BeamIntensityIndex=18.00
ChamberPressure=160.85e-6
Detector=BSE
DwellTime=1.0000e-6
EmissionCurrent=129.15e-6
Gun=Schottky
GunShiftX=0.0
GunShiftY=0.0
GunTiltX=-2.4135
GunTiltY=-10.468
HV=30.000e3
IMLCenteringX=-6.0300
IMLCenteringY=-14.860
ImageShiftX=0.0
ImageShiftY=0.0
LUTGamma=1.5083
LUTMaximum=109
LUTMinimum=53
MixingMode=0
OBJCenteringX=-7.5181
OBJCenteringY=835.61e-3
OBJPreCenteringX=-7.2100
OBJPreCenteringY=-690.00e-3
PredictedBeamCurrent=4.81564116427e-9
PrimaryDetectorGain=26.367
PrimaryDetectorOffset=93.359
ScanMode=RESOLUTION
ScanRotation=0.0
ScanSpeed=3
SpecimenCurrent=2.74358974359e-9
SpotSize=26.4284582154e-9
StageRotation=120.00
StageTilt=0.0
StageX=-2.3027e-3
StageY=3.0250e-3
StageZ=23.207e-3
StigmatorX=0.0
StigmatorY=0.0
SystemPressure=160.85e-6
TiltCorrection=0.0
WD=11.786e-3



******* EDS *******

fVersion: 0.70
aVersion: 4.40
da_year: 2021
da_day: 1
da_mon: 6
ti_min: 10
ti_hour: 2
ti_hund: 0
ti_sec: 39
fileSize: 20224
numPts: 4096
intersectingdistance: 1500
workingdistance: 1515
scalesetting: 4000
spotXY: 0.000000,0.000000
evPerChan: 5
startEnergy: 0
endEnergy: 20.4750
liveTime: 1310.7200
tilt: 0
takeoff: 35.1800
detReso: 1
kV: 30
Magnification: 73
Working distance (mm): 15.13
Micrometers per pixel X: 7.0901
Micrometers per pixel Y: 7.6027